Advances in Materials Science and Engineering / 2019 / Article / Tab 1

Research Article

Design and Analysis of a Novel Piezo-Actuated XYθz Micropositioning Mechanism with Large Travel and Kinematic Decoupling

Table 1

Fixed parameters of the mechanism.

Piezoelectric actuator (P885.91, Physik Instrumente, Germany)
 Stiffness of the piezo stack25 N/μm
 Stiffness of the preloading mechanism5.89 N/μm
 Size of piezo stack5 mm × 5 mm × 36 mm
 Operating voltage−20 V–120 V
 Piezoelectric constant0.316 μm/V

Material (Al 7075)
 Elastic modulus72 GPa
 Shear modulus27 GPa
 Density2750 kg/m3
 Yield strength500 MPa

Right circular flexure hinge 1
 Hinge thickness, t10.4 mm
 Cutting radius, R11.2 mm

Right circular flexure hinge 2
 Hinge thickness, t20.5 mm
 Cutting radius, R21.0 mm

Right circular flexure hinge 3
 Hinge thickness, t30.4 mm
 Cutting radius, R30.5 mm

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