Research Article
Design and Analysis of a Novel Piezo-Actuated XYθz Micropositioning Mechanism with Large Travel and Kinematic Decoupling
Table 2
Optimization parameters and results.
| | Parameters | X/Y-directional part | θz-directional part | | α | L1 | la | lo | R | x |
| | Parameter limit | | | | | | | | | Lower | 1 | 5 | 10 | 0 | 5 | 0.3 | 6 | | Upper | 4 | 40 | 20 | 19 | 48 | 3 | 21 | | Optimization results | 1 | 17 | 17.8 | 19 | 5 | 0.3 | 6 | | Unit | mm | deg | mm | mm | mm | mm | mm |
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