Advances in Materials Science and Engineering / 2019 / Article / Tab 2

Research Article

Design and Analysis of a Novel Piezo-Actuated XYθz Micropositioning Mechanism with Large Travel and Kinematic Decoupling

Table 2

Optimization parameters and results.

ParametersX/Y-directional partθz-directional part
αL1laloRx

Parameter limit
Lower1510050.36
Upper440201948321
Optimization results11717.81950.36
Unitmmdegmmmmmmmmmm

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