Advances in Materials Science and Engineering / 2019 / Article / Tab 3

Research Article

Design and Analysis of a Novel Piezo-Actuated XYθz Micropositioning Mechanism with Large Travel and Kinematic Decoupling

Table 3

Comparison of outputs obtained employing the theoretical model and FEA.

X/Y (μm)θz (mrad)

Theoretical modal259.711.3
Finite element analysis240.010.0
Error (%)8.213.0

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