Design and Analysis of a Novel Piezo-Actuated <i>XYθ</i><sub><i>z</i></sub> Micropositioning Mechanism with Large Travel and Kinematic Decoupling

<table class="table-group" id="tab3"><tr><td><table class="table"><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr class="thead"><td class="align_left"> </td><td class="align_center"><i>X</i>/<i>Y</i> (<i>μ</i>m)</td><td class="align_center"><i>θ</i><sub><i>z</i></sub> (mrad)</td></tr><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr><td class="align_left">Theoretical modal</td><td class="align_center">259.7</td><td class="align_center">11.3</td></tr><tr><td class="align_left">Finite element analysis</td><td class="align_center">240.0</td><td class="align_center">10.0</td></tr><tr><td class="align_left">Error (%)</td><td class="align_center">8.2</td><td class="align_center">13.0</td></tr><tr class="table-tr"><td colspan="3"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

<div>Comparison of outputs obtained employing the theoretical model and FEA.</div>

Advances in Materials Science and Engineering

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Table 3

Table 3: Design and Analysis of a Novel Piezo-Actuated <i>XYθ</i><sub><i>z</i></sub> Micropositioning Mechanism with Large Travel and Kinematic Decoupling 

Advances in Materials Science and Engineering

Design and Analysis of a Novel Piezo-Actuated XYθz Micropositioning Mechanism with Large Travel and Kinematic Decoupling

Table 3

Design and Analysis of a Novel Piezo-Actuated XYθ_z Micropositioning Mechanism with Large Travel and Kinematic Decoupling