Pull-In and Snap-Through Analysis of Electrically Actuated Viscoelastic Curved Microbeam

Table 2

Geometrical and mechanical properties of the viscoelastic curved system [5, 8].

Parameter	Quantity
L	1000 μm
b	30 μm
h	2.4 μm
d	10.1 μm
d0	3.5 μm
	166 GPa
λ	0.1
	0.22
B	0.4
L	0.15 μm
ρ	2332 kgm^−3