Characterization of TiZrN and TaZrN Nanocomposite Multilayer Coating Deposited via RF/DC Magnetron Sputtering on AISI4140 Steel

Figure 2

Cross-section SEM image of TiZrN/TaZrN films with different temperatures: (a) S1 (TiZrN) at 200°C, (b) S2 (TiZrN) at 400°C, (c) S1 (TaZrN) at 200°C, and (d) S1 (TaZrN) at 400°C.