Research Article
Characterization of TiZrN and TaZrN Nanocomposite Multilayer Coating Deposited via RF/DC Magnetron Sputtering on AISI4140 Steel
Table 1
Operating parameters for deposition of TiZrN/TaZrN thin film coating.
| | Parameters | TiZrN | TaZrN |
| | Chamber base pressure | 4 × 10−6 m bar | 4 × 10−6 m bar | | Deposition pressure | 4 × 10−3 m bar | 4 × 10−3 m bar | | Ar : N2 flow rate | 15 : 3 sccm | 15 : 3 sccm | | Target distance | 70 mm | 70 mm | | Substrate temperature | 200°C and 400°C | 200°C and 400°C | | Interlayer | 60 min | 60 min | | Ti (DC) and Ta (DC) | 100 W | 100 W | | Zr (RF) | 100 W | 100 W |
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