Investigation of Stereometric and Fractal Patterns of Spin-Coated LuMnO₃ Thin Films

Table 3

Surface microtexture parameters of LuMnO₃ thin films, according to ISO 25178-2:2012.

Parameter	Unit	LuMnO650	LuMnO750	LuMnO850
Furrows
Maximum depth	(nm)	0.83 ± 0.07	1.34 ± 0.34	6.05 ± 0.11
Mean depth	(nm)	0.35 ± 0.02	0.55 ± 0.15	2.15 ± 0.19
Texture
TI	(%)	56.48 ± 9.39	56.50 ± 12.54	56.92 ± 5.68
Sal	(μm)	0.19 ± 0.02	0.23 ± 0.04	0.21 ± 0.03
Str	(—)	0.56 ± 0.09	0.56 ± 0.12	0.57 ± 0.06
First direction	(°)	128.39 ± 23.41	135.00 ± 0.01	107.26 ± 18.79
Second direction	(°)	134.99 ± 13.09	105.88 ± 27.50	83.89 ± 41.92
Third direction	(°)	96.62 ± 41.71	76.77 ± 44.95	121.50 ± 22.70

denotes samples without significant difference, ANOVA One-Way and Tukey Test ().