PECVD-ONO: A New Deposited Firing Stable Rear Surface Passivation Layer System for Crystalline Silicon Solar Cells

Table 1

Best solar cells of this investigation.

Rear passivation	Area	𝑉oc	𝐽sc	FF	η
PECVD-ONO	4.0 cm^2	664 mV	38.2 mA/cm^2	78.7%	20.0%
Thermal SiO2	4.0 cm^2	676 mV	38.3 mA/cm^2	80.4%	20.8%