Fabrication of Proton-Exchange Waveguide Using Stoichiometric LiTaO₃ for Guided Wave Electrooptic Modulators with Polarization-Reversed Structure

Table 1

The surface refractive index change Δ𝑛_𝑒 and the exchange coefficient 𝐷_ex in the proton exchange slab waveguides of SLT and CLT.

	Δ𝑛𝑒	𝐷ex(10^−12cm^2/s)
Stoichiometric LiTaO3 (benzoic acid, 240 degrees)	0.017	0.25
Congruent LiTaO3 [6] (benzoic acid, 249 degrees)	0.017	0.184