Electrodes for Microfluidic Integrated Optoelectronic Tweezers
Figure 2
(a) A master mold fabricated by SU-8 is used to define the PDMS microfluidic channels. (b) Evaporating through a shadow mask placed near the PDMS enables the fabrication of patterned Au/Ti wires on the upper surface of channels. (c) Covalent bonding is formed between the Au/Ti-mesh PDMS and the OET chip after oxygen plasma treatment on the bonding surfaces.
