375451.fig.002a
(a)
375451.fig.002b
(b)
375451.fig.002c
(c)
Figure 2: (a) A master mold fabricated by SU-8 is used to define the PDMS microfluidic channels. (b) Evaporating through a shadow mask placed near the PDMS enables the fabrication of patterned Au/Ti wires on the upper surface of channels. (c) Covalent bonding is formed between the Au/Ti-mesh PDMS and the OET chip after oxygen plasma treatment on the bonding surfaces.