Review Article

Applications of Fianite in Electronics

Table 4

Optimal modes of fianite and ZrO2 sputtering.

Target materialFianiteZrO2

InstallationZ-400Z-550
Target diameter 70 mm 203 mm
Argon pressure  mBar  mBar
Power~500 Wt~400 Wt
Film growth rate100 Å/min~50 Å/min