Review Article
Applications of Fianite in Electronics
Table 4
Optimal modes of fianite and ZrO2 sputtering.
| Target material | Fianite | ZrO2 |
| Installation | Z-400 | Z-550 | Target diameter | 70 mm | 203 mm | Argon pressure | mBar | mBar | Power | ~500 Wt | ~400 Wt | Film growth rate | 100 Å/min | ~50 Å/min |
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