Research Article
Design and Optimization of Polarization Splitting and Rotating Devices in Silicon-on-Insulator Technology
Table 1
Comparison among different PMC architectures.
| Device | Performance | | | Etch step |
| [26] | PER = 15 dB | 300 nm | 40 μm | 2 | Device #1 | PER = 26 dB PCE = 99.7% | 100 nm | 25 μm |
| [30] | PER = 16 dB PCE = 97.5% | 47 nm | 10 μm | 1 | Device #2 | PER > 17 dB PCE > 98% | 50 nm | 5 μm |
| [31] | PCE = 82.2% | 30 nm | 25 μm | 2 | Device #3 | PER > 17.5 dB PCE = 98.3% | 20 nm | 29 μm |
| [32] | PCE ≃100% | 70 nm | 100 μm | 1 | Device #4 | PER = 39 dB PCE ≃100% | 170 nm | 75 μm |
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