Advances in Optical Technologies / 2008 / Article / Fig 2

Research Article

Optical Filters Utilizing Ion Implanted Bragg Gratings in SOI Waveguides

Figure 2

Fabrication process of planar SOI gratings for the case of (a) oxygen implantation and (b) silicon implantation.
276165.fig.002a
(a)
276165.fig.002b
(b)

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