Collective Micro-Optics Technologies for VCSEL Photonic Integration

<table>Main microoptical elements developed for VCSEL beam shaping: refractive lens (a), Fresnel-like or diffractive microlens (b), microtip (c). These objects can be fabricated either directly on the emitting surface (top or bottom) or above an intermediate transparent pedestal layer (dot line).</table>

Advances in Optical Technologies

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Figure 2

Figure 2: Collective Micro-Optics Technologies for VCSEL Photonic Integration 