Collective Micro-Optics Technologies for VCSEL Photonic Integration
Figure 5
Lens fabrication by etching the back surface of a bottom-emitting VCSEL (a) refractive lens [27], (b) hybrid (refractive + diffractive) lens [14], (c) VCSEL with an integrated GaAs microtip (bottom) for light emitting cantilever microprobe [9] (reprinted, resp., from [27] OSA 2004, [14] IEEE 2001, [9] American Institute of Physics 2000).
