Fabrication and Evaluation of Large Area Mo/Si Soft X-Ray Multilayer Mirrors at Indus SR Facilities
Figure 1
Measured and fitted XRR profile at Cu Kα wavelength (λ = 1.54 Å) for Mo thin films. (a) as a function of Ar pressure (b) as a function of Mo thickness at constant Ar pressure. The best fit results are given in Table 1.
