Fabrication and Evaluation of Large Area Mo/Si Soft X-Ray Multilayer Mirrors at Indus SR Facilities

Table 1

Mo film quality interms of thickness (𝑡), roughness (𝜎) and density (𝜌), as a function of argon pressure obtained from the best-fit XRR results of Figure 1.

Film	𝑃	𝑡	𝜎	𝜌
	(mbar)	(Å)	(Å)	(gm/cc)
Mo-1	4.0 × 10^−3	87.5	4	7.07
Mo-2	4.0 × 10^−3	116	4.5	10.06
Mo-3	4.0 × 10^−3	180	6	10.1
Mo-4	3 × 10^−3	155	3	10.2
M0-5	5 × 10^−3	160	6.5	9.79
Mo-6	8 × 10^−3	175	8	8.86