Realization of Ultraflat Plastic Film Using Dressed-Photon-Phonon-Assisted Selective Etching of Nanoscale Structures

Figure 4

Schematic of (a) the surface roughness, , and the standard deviation of the height difference function, . (c) Etching time dependence of the standard deviation of . The blue dashed curve corresponds to Figure 2(a) (before etching); the blue solid curve corresponds to Figure 2(b) (after 120 min etching using 3.81 eV DPP etching); the red dashed curve corresponds to Figure 2(c) (before etching); the red solid curve corresponds to Figure 2(d) (after 5 min etching using 5.82 eV conventional photochemical etching).