Room-Temperature Growth of SiC Thin Films by Dual-Ion-Beam Sputtering Deposition
Figure 2
(a) Top-, and (b) cross-sectional SEM micrographs of
the sample prepared on Si with nonirradicated, (c) top-, and (d) cross-sectional SEM
micrographs of the sample irradiated by 150 eV ion beam.
