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Research Letters in Physical Chemistry
Volume 2008, Article ID 760650, 5 pages
http://dx.doi.org/10.1155/2008/760650
Research Letter

Room-Temperature Growth of SiC Thin Films by Dual-Ion-Beam Sputtering Deposition

C. G. Jin,1,2 X. M. Wu,1,2 and L. J. Zhuge2,3

1Department of Physics, Suzhou University, Suzhou 215006, China
2The Key Laboratory of Thin Films of Jiangsu, Suzhou University, Suzhou 215006, China
3Analysis and Testing Center, Suzhou University, Suzhou 215006, China

Received 16 January 2008; Accepted 7 March 2008

Academic Editor: Igor Murin

Copyright © 2008 C. G. Jin et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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