Electron-Collision-Induced Dissociative Ionization Cross Sections for Silane

Figure 4

(a) 3D profiles of the double differential cross sections (in the units of 10⁻²⁰cm²/eV-sr) as a function of secondary electron energy 𝜀 and angle 𝜃 at 𝐸=100eV. (b) Same as (a) but at 𝐸=200eV.

(a)

(b)