Research Article
A 25 kW, 25 kHz Induction Heating Power Supply for MOVPE System Using L-LC Resonant Inverter
Figure 12
Experimental waveforms. (a) (trace 1, 200 V/div) and (trace 2, 25 A/div); -scale: 5 μs/div. (b) Waveforms at turn-on: IGBT collector-to-emitter voltage (trace 1, 200 V/div) and gate-to-emitter voltage (trace 2, 10 V/div) -scale: 500 ns/div. (c) Waveforms at turn-off: IGBT collector-to-emitter voltage (trace 1, 200 V/div) and gate-to-emitter voltage (trace 2, 10 V/div) -scale: 500 ns/div. (d) (trace 1, 200 V/div) and the voltage across the work coil (trace 2, 200 V/div) -scale: 10 μs/div.
