Abstract

Analytical approximate expressions for the resistivity and its temperature coefficient of thin polycrystalline metal films have been derived by considering separately the contributions of the grain-boundaries perpendicular to the x-, y- and z-axes. Provided that the grain-boundaries act as moderately efficient scatterers reasonable deviations from the three-dimensional model are obtained; an approximate model then seems convenient with which to perform the calculations of the strain coefficients of such fine-grained films.