Abstract
The temperature characteristics of RuO2-based thick film resistors on various substratcs having different thermal expansion coefficient have been investigated.It became clear that, if the thermal expansion coefficient of the substrate is larger than that of the thick film resistor, a compression is being exerted by the substrate on the as-fired resistor at low temperature. As temperature rises, the resistance value increases, and the TCR becomes positive.On the contrary, if the thermal expansion coefficient of the resistor is larger than that of the substrate, the as-fired resistor is being stretched by the substrate at low temperature. As temperature rises, the resistancc value decreases, and the TCR becomes negative.