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Active and Passive Electronic Components
Volume 13, Issue 4, Pages 237-248

The Structure and Heat Dependence of Silicon Spreading Resistance Temperature Sensors

MEV Microelectronics Co., P.O.B. 21., Budapest H-1325, Hungary

Received 31 May 1988; Accepted 30 September 1988

Copyright © 1989 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


The construction method of the sensor SRTS with two roundshaped diffusion layers is given. The effect of geometry on the sensor resistance is determined theoretically. An approximating method is given to determine the temperature dependence of the sensor in the range of 200K < T < 400K. Calculated results are compared to measurements.