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Active and Passive Electronic Components
Volume 2008, Article ID 905628, 9 pages
http://dx.doi.org/10.1155/2008/905628
Research Article

The Effect of Residual Stress on the Electromechanical Behavior of Electrostatic Microactuators

Department of Electrical Engineering, National Penghu University, Penghu 880, Taiwan

Received 22 October 2008; Accepted 21 December 2008

Academic Editor: Yalin Lu

Copyright © 2008 Ming-Hung Hsu. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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