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Active and Passive Electronic Components
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Active and Passive Electronic Components
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2012
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Article
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Fig 8
/
Research Article
GaN-Based High-
k
Praseodymium Oxide Gate MISFETs with
+ UV Interface Treatment Technology
Figure 8
The SIMS measurements of the S atoms (a) and O atoms (b) distribution versus AlGaN/GaN depth for various treatment samples.
(a)
(b)