Active and Passive Electronic Components / 2013 / Article / Tab 5

Research Article

Design and Analysis of Wideband Ladder-Type Film Bulk Acoustic Wave Resonator Filters in Ku-Band

Table 5

Comparisons of 1D and 3D FEM of Filter A.

ParametersSeries FBARShunt FBAR
1D3D FEM1D3D FEM

(pF)0.68720.68370.06140.0651
(pF)0.03510.03730.03790.0357
(nH)2.862.6934.61632.897
(%)6.066.366.546.51
(GHz)15.9015.8714.7014.67
(GHz)16.3016.3015.1015.12

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