A Correlative Defect Analyzer Combining Glide Test with Atomic Force Microscope
Glide objective illustration. (a) shows the internal construction of the glide objective with a 5x lens group enables the imaging on the back of the glide head. An adjustable spring enables the fine focus on the glide head. The preamplifier is integrated to the glide objective to achieve short wire length to the glide sensor. (b) The image of the back of the glide head. In the field of the view, only the center part of the glide head is visible, showing the dimple of the suspension HGA. Glide head position is calibrated against the dimple position.