(a) Real-time measurements using SMPS and dust monitor
(b) Particle size distributions measured by SMPS (left; CVD room, (1st day, 10:56–07:41); left; CNT purification room (2nd day, 09:13–15:40)
(c) Change in particle size distribution according to SMPS
(d) Process and sampling locations
Figure 4: Real-time particle measurements at workplace B.