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Complexity
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2018
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Article
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Tab 1
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Research Article
Model-Based ILC with a Modified
-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage
Table 1
Parameters in the wafer stage model.
Parameter
Value
Parameter
Value
Parameter
Value
1/20
23.85
580
μ
s
0.0130
0.040
2
π
× 150 rad/s
0.0023
0.018
2
π
× 292 rad/s
0.0038
0.027
2
π
× 510 rad/s