Table of Contents
Conference Papers in Energy
Volume 2013, Article ID 560587, 5 pages
Conference Paper

Development of Textured ITO Optical Windows for Photovoltaic Applications

Photon Energy Technology Laboratory, Centre for Green Energy Technology, Madanjeet School of Green Energy Technologies, Pondicherry University, Puducherry 605014, India

Received 3 January 2013; Accepted 30 April 2013

Academic Editors: B. Bhattacharya and U. P. Singh

This Conference Paper is based on a presentation given by N. Tamilselvan at “International Conference on Solar Energy Photovoltaics” held from 19 December 2012 to 21 December 2012 in Bhubaneswar, India.

Copyright © 2013 N. Tamilselvan and Periyasamy Thilakan. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


ITO thin films were deposited on glass substrates using rf magnetron sputtering. Deposition parameters such as the rf power and the oxygen dilution to the plasma are investigated. Films deposited with an increase in rf power were resulting in the film preferential orientation along (100) plane. Oxygen dilution to the plasma at low rf power of 30 W was found to result in a change in preferential orientation from (100) plane to (111) plane. SEM analysis revealed a spotty surface morphology for the (100) films and a granular morphology for the (111) films. The highest transmittance was found for the oxygen diluted (111) film. The highest optical bandgap of 4.33 eV was observed for the pure Ar deposited film. Details are discussed.