Analysis and Control on a Specific Electromagnetic Micromirror

Table 2

Characters of modal analysis.

Modes	Resonant frequencies (Hz)	Motions
Mode 1	770.97	Inner frame, slow beams, ellipse micromirror, ellipse reinforce ring, quick beams, elliptical ring 1, and elliptical ring 2 were taken as a whole (W1) and rotate around slow beams
Mode 2	1523.9	Motion of W1 is perpendicular to the outer frame plane
Mode 3	2786.6	Motion of W1 is horizontal in the outer frame plane and is perpendicular to original slow beams
Mode 4	5150.2	W1 is rocking around the quick beams
Mode 5	5487.9	W1 revolves around its center in outer frame plane
Mode 6	16309	Ellipse micromirror, ellipse reinforce ring, quick beams, and elliptical ring 1 taken as a whole (W2) rotate around the quick beams
Mode 7	21711	W2 and inner frame with slow beams are vertical motions which are perpendicular to the outer frame, while their directions are opposite
Mode 8	50074	Motion of inner frame is horizontal along the original slow beams, while W2 rotates around quick beams and ellipse reinforce ring may cause some distortions which are not recovered
Mode 9	52054	W2 rotates around the slow beams
Mode 10	62000	Edges along the slow beams and edges along the quick beams both in the inner frame are folding and unfolding at the same time, while in the opposite direction they may cause some distortions which are not expected