Table of Contents
Dataset Papers in Science
Volume 2013, Article ID 597023, 8 pages
http://dx.doi.org/10.1155/2013/597023
Dataset Paper

Investigation of the Working Parameters of a Single Magnetron of a Multiple Ion Cluster Source: Determination of the Relative Influence of the Parameters on the Size and Density of Nanoparticles

Instituto de Ciencia de Materiales de Madrid, Consejo Superior de Investigaciones Científicas, C/ Sor Juana Inés de la Cruz 3, 28049 Madrid, Spain

Received 4 March 2013; Accepted 2 April 2013

Academic Editors: B. Todorovic Markovic and T. Tsurui

Copyright © 2013 Manuel Ruano et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Manuel Ruano, Lidia Martínez, and Yves Huttel, “Investigation of the Working Parameters of a Single Magnetron of a Multiple Ion Cluster Source: Determination of the Relative Influence of the Parameters on the Size and Density of Nanoparticles,” Dataset Papers in Science, vol. 2013, Article ID 597023, 8 pages, 2013. https://doi.org/10.1155/2013/597023.