Table of Contents
Dataset Papers in Science
Volume 2013 (2013), Article ID 597023, 8 pages
http://dx.doi.org/10.1155/2013/597023
Dataset Paper

Investigation of the Working Parameters of a Single Magnetron of a Multiple Ion Cluster Source: Determination of the Relative Influence of the Parameters on the Size and Density of Nanoparticles

Instituto de Ciencia de Materiales de Madrid, Consejo Superior de Investigaciones Científicas, C/ Sor Juana Inés de la Cruz 3, 28049 Madrid, Spain

Received 4 March 2013; Accepted 2 April 2013

Academic Editors: B. Todorovic Markovic and T. Tsurui

This dataset has been dedicated to the public domain using the CC0 waiver.

Dataset http://dx.doi.org/10.1155/2013/597023/dataset

Dataset

Dataset Item 1 (Images). Sixty-seven AFM images required for the estimation of the size distribution for nanoparticles deposits. Each deposit has been measured by AFM by recording images of scan areas of 1 μm × 1 μm. AFM images were analyzed, and from these images, the height of 3604 nanoparticles was extracted. For each nanoparticles deposit, the fit of the nanoparticles size distribution was performed.

Dataset Item 2 (3D Object Data). Sixty-seven STP files for the full content of Dataset Item 1 (Images) that allow the analysis of the images

Dataset Item 3 (Table). Size distribution data extracted from images 1–4 in Dataset Item 1.

  • Column 1: NP Size (nm)
  • Column 2: Number of Events

Dataset Item 4 (Table). Size distribution data extracted from images 5–9 in Dataset Item 1.

  • Column 1: NP Size (nm)
  • Column 2: Number of Events

Dataset Item 5 (Table). Size distribution data extracted from images 10–13 in Dataset Item 1.

  • Column 1: NP Size (nm)
  • Column 2: Number of Events

Dataset Item 6 (Table). Size distribution data extracted from images 14–19 in Dataset Item 1.

  • Column 1: NP Size (nm)
  • Column 2: Number of Events

Dataset Item 7 (Table). Size distribution data extracted from images 20–22 in Dataset Item 1.

  • Column 1: NP Size (nm)
  • Column 2: Number of Events

Dataset Item 8 (Table). Size distribution data extracted from images 23–27 in Dataset Item 1.

  • Column 1: NP Size (nm)
  • Column 2: Number of Events

Dataset Item 9 (Table). Size distribution data extracted from images 28–32 in Dataset Item 1.

  • Column 1: NP Size (nm)
  • Column 2: Number of Events

Dataset Item 10 (Table). Size distribution data extracted from images 33–37 in Dataset Item 1.

  • Column 1: NP Size (nm)
  • Column 2: Number of Events

Dataset Item 11 (Table). Size distribution data extracted from images 38–42 in Dataset Item 1.

  • Column 1: NP Size (nm)
  • Column 2: Number of Events

Dataset Item 12 (Table). Size distribution data extracted from images 43–46 in Dataset Item 1.

  • Column 1: NP Size (nm)
  • Column 2: Number of Events

Dataset Item 13 (Table). Size distribution data extracted from images 47–50 in Dataset Item 1.

  • Column 1: NP Size (nm)
  • Column 2: Number of Events

Dataset Item 14 (Table). Size distribution data extracted from images 51–54 in Dataset Item 1.

  • Column 1: NP Size (nm)
  • Column 2: Number of Events

Dataset Item 15 (Table). Size distribution data extracted from images 55–59 in Dataset Item 1.

  • Column 1: NP Size (nm)
  • Column 2: Number of Events

Dataset Item 16 (Table). Size distribution data extracted from images 60–63 in Dataset Item 1.

  • Column 1: NP Size (nm)
  • Column 2: Number of Events

Dataset Item 17 (Table). Size distribution data extracted from images 64–67 in Dataset Item 1.

  • Column 1: NP Size (nm)
  • Column 2: Number of Events