Dataset Papers in Science / 2013 / Article / Fig 5

Dataset Paper

Investigation of the Working Parameters of a Single Magnetron of a Multiple Ion Cluster Source: Determination of the Relative Influence of the Parameters on the Size and Density of Nanoparticles

Figure 5

Average nanoparticle size (a) and deposition rate (b) as a function of the total Argon flux for a fixed Ar flux applied to Ag magnetron. The aggregation length is the distance between the magnetron and the exit slit of the aggregation zone.

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