Investigation of the Working Parameters of a Single Magnetron of a Multiple Ion Cluster Source: Determination of the Relative Influence of the Parameters on the Size and Density of Nanoparticles
Figure 5
Average nanoparticle size (a) and deposition rate (b) as a function of the total Argon flux for a fixed Ar flux applied to Ag magnetron. The aggregation length is the distance between the magnetron and the exit slit of the aggregation zone.
