Dataset Papers in Science / 2013 / Article / Tab 2

Dataset Paper

Investigation of the Working Parameters of a Single Magnetron of a Multiple Ion Cluster Source: Determination of the Relative Influence of the Parameters on the Size and Density of Nanoparticles

Table 2

Row data from Figure 2 and details of the AFM images and the size distribution data associated with Figure 2 values.

= 60 sccm
(mm) (sccm)Average NP size (nm)NP ·  m−2 · s−1AFM imagesSize distribution file

17057.1 ± 1.15.2 ± 0.5Images 1–4Dataset Item 3
105.2 ± 1.04.4 ± 0.3Images 5–9Dataset Item 4
203.0 ± 1.02.9 ± 0.5Images 10–13Dataset Item 5

12555.1 ± 1.23.9 ± 0.3Images 14–19Dataset Item 6

103.8 ± 0.82.4 ± 0.3Images 20–22Dataset Item 7
202.6 ± 1.02.2 ± 0.2Images 23–27Dataset Item 8

9554.4 ± 0.93.1 ± 0.1Images 28–32Dataset Item 9
102.8 ± 1.22.8 ± 0.2Images 33–37Dataset Item 10
201.6 ± 0.71.5 ± 0.3Images 38–42Dataset Item 11

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