Investigation of the Working Parameters of a Single Magnetron of a Multiple Ion Cluster Source: Determination of the Relative Influence of the Parameters on the Size and Density of Nanoparticles

Table 2

Row data from Figure 2 and details of the AFM images and the size distribution data associated with Figure 2 values.

𝜙𝑇 = 60 sccm
𝐿Ag (mm)	𝜑Ag (sccm)	Average NP size (nm)	NP · 𝜇m^−2 · s^−1	AFM images	Size distribution file
170	5	7.1 ± 1.1	5.2 ± 0.5	Images 1–4	Dataset Item 3
	10	5.2 ± 1.0	4.4 ± 0.3	Images 5–9	Dataset Item 4
	20	3.0 ± 1.0	2.9 ± 0.5	Images 10–13	Dataset Item 5
125	5	5.1 ± 1.2	3.9 ± 0.3	Images 14–19	Dataset Item 6
	10	3.8 ± 0.8	2.4 ± 0.3	Images 20–22	Dataset Item 7
	20	2.6 ± 1.0	2.2 ± 0.2	Images 23–27	Dataset Item 8
95	5	4.4 ± 0.9	3.1 ± 0.1	Images 28–32	Dataset Item 9
	10	2.8 ± 1.2	2.8 ± 0.2	Images 33–37	Dataset Item 10
	20	1.6 ± 0.7	1.5 ± 0.3	Images 38–42	Dataset Item 11