Dataset Papers in Science / 2013 / Article / Tab 4

Dataset Paper

Investigation of the Working Parameters of a Single Magnetron of a Multiple Ion Cluster Source: Determination of the Relative Influence of the Parameters on the Size and Density of Nanoparticles

Table 4

Row data from Figure 4 and details of the AFM images and the size distribution data associated with Figure 4 values.

= 80 sccm
(mm) (sccm) (sccm)Average NP size (nm)NP ·  m−2 · s−1AFM imagesSize distribution file

170505.8 ± 0.95.6 ± 0.4Images 43–46Dataset Item 12
56.7 ± 0.77.3 ± 0.3Images 47–50Dataset Item 13
208.5 ± 0.94.4 ± 0.5Images 51–54Dataset Item 14
309.1 ± 1.01.6 ± 0.2Images 55–59Dataset Item 15

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