Multiple Ion Cluster Source for the Generation of Magnetic Nanoparticles: Investigation of the Efficiency as a Function of the Working Parameters for the Case of Cobalt
Figure 2
Evolution of the mean size and deposition rate of Co nanoparticles as a function of the power applied to the magnetron and for a fixed argon flux of 5 sccm on the magnetron (a). The same as (a) but with a higher argon flux on the magnetron (30 sccm) and for a higher applied power range (b).
