Microdroplet Actuation via Light Line Optoelectrowetting (LL-OEW)

Figure 3

Cross-sectional sketch (not to scale, colors not related to spectral transmission characteristics) of layer sequence of chip/module. From bottom to top: 1.1 µm thick glass slide (substrate), (140 ± 20) nm thick ITO electrode layer, (790 ± 10) nm thick a-Si : H photoconductive layer (dielectric number ε_pc = 11.8), (360 ± 10) nm thick Parylene C dielectric layer (ε_diel = 3.1), approx. 10 nm thick PTFE AF 1600 hydrophobic layer, 100 µm to 250 µm thick Ordyl® SY 355 spacer, approx. 10 nm thick PTFE AF 1600 hydrophobic layer, (140 ± 20) nm thick ITO electrode layer, and 1.1 µm thick glass slide (superstrate).