Research Article
Plasma Reactors and Plasma Thrusters Modeling by Ar Complete Global Models
Table 7
Sensitivity of various PR parameters for a pressure of 10 mTorr, including the configuration of the available experiment [
15].
| (a) |
| | Parameters values | (eV) | (1011 cm−3) | (1010 cm−3) | (%) |
| | : 5/50/500 sccm | 2.51/2.51/2.51 | 3.80/3.80/3.81 | 2.68/2.69/2.71 | .20/.20/.20 | | : 300/500/1000 K | 2.34/2.51/2.78 | 3.90/3.80/3.57 | 3.25/2.69/2.04 | .12/.20/.37 | | : 5/15.24/25 cm | 2.76/2.51/2.47 | 12.46/3.80/1.89 | 3.85/2.69/2.51 | .65/.20/.10 | | : 5/7.62/25 cm | 2.73/2.51/2.10 | 3.81/3.80/3.03 | 3.81/2.69/1.16 | .20/.20/.16 | | : 150/600/1000 W | 2.51/2.51/2.51 | 1.30/3.80/5.34 | 2.67/2.69/2.67 | .07/.20/.28 |
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| (b) |
| | Parameters values | ratios | ratios | ratios | ratios |
| | : 5/50/500 sccm | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.01 | 1.00 | 1.00 | | : 300/500/1000 K | 1.07 | 1.11 | .97 | .94 | .83 | .76 | 1.67 | 1.85 | | : 5/15.24/25 cm | .91 | .98 | 3.28 | .50 | .70 | .93 | .31 | .50 | | : 5/7.62/25 cm | .92 | .84 | .31 | .80 | .71 | .43 | 1.00 | .80 | | : 150/600/1000 W | 1.00 | 1.00 | 2.92 | 1.41 | 1.01 | .99 | 2.86 | 1.40 |
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