Research Article
Plasma Reactors and Plasma Thrusters Modeling by Ar Complete Global Models
Table 8
As in Table
7 but for a pressure of 5 mTorr.
| (a) |
| | Parameters values | (eV) | (1011 cm−3) | (1010 cm−3) | (%) |
| | : 5/50/500 sccm | 2.97/2.97/2.98 | 2.89/2.89/2.90 | 2.64/2.64/2.66 | .30/.30/.30 | | : 300/500/1000 K | 2.73/2.97/3.38 | 3.03/2.89/2.70 | 3.19/2.64/2.01 | .19/.30/.56 | | : 5/15.24/25 cm | 3.33/2.97/ 2.91 | 9.88/2.89/1.44 | 3.72/2.64/2.44 | 1.02/.30/.15 | | : 5/7.62/25 cm | 3.26/2.97/2.47 | 2.95/2.89/2.29 | 3.58/2.64/1.27 | .31/.30/.24 | | : 150/600/1000 W | 2.97/2.97/2.97 | .96/2.89/4.18 | 2.59/2.64/2.63 | .10/.30/.43 |
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| (b) |
| | Parameters values | ratios | ratios | ratios | ratios |
| | : 5/50/500 sccm | 1.00 | 1.00 | 1.00 | 1.00 | 1.00 | 1.01 | 1.00 | 1.00 | | : 300/500/1000 K | 1.09 | 1.14 | .95 | .93 | .83 | .76 | 1.58 | 1.87 | | : 5/15.24/25 cm | .89 | .98 | .29 | .50 | .71 | .92 | .29 | .50 | | : 5/7.62/25 cm | .91 | .83 | .98 | .79 | .74 | .48 | .97 | .80 | | : 150/600/1000 W | 1.00 | 1.00 | 3.01 | 1.45 | 1.02 | 1.00 | 3.00 | 1.43 |
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