Research Article
Plasma Reactors and Plasma Thrusters Modeling by Ar Complete Global Models
Table 9
Sensitivity of core region plasma parameters, for a pressure of 2.5 mTorr. Presentation of results follows this of Tables
7 and
8.
(a) |
| Parameters values | (eV) | (1012 cm−3) | (1010 cm−3) | (%) |
| : 0.2/2/20 sccm | 4.56/4.72/ 5.77 | 5.89/5.77/5.17 | 1.45/1.63/2.73 | 22.5/21.4/17.0 | : 200/400/800 K | 3.91/4.72/6.14 | 6.40/5.77/4.99 | 2.01/1.63/1.28 | 13.7/21.4/31.8 | : 0.15/0.3/0.6 cm | 9.96/4.72/3.39 | 7.48/5.77/3.49 | 1.61/1.63/1.37 | 44.2/21.4/8.7 | : 9./13./16 cm | 6.07/4.72/4.36 | 7.18/5.77/4.93 | 1.28/1.63/1.80 | 38.3/21.4/15.5 | Loss to mantle 3/5/8% | 4.40/4.72/5.13 | 6.12/5.77/5.34 | 1.23/1.63/2.18 | 24.6/21.4/18.1 | : 50/100/200 W | 3.98/4.72/8.76 | 3.17/5.77/8.12 | 2.25/1.63/0.80 | 7.5/21.4/61.39 |
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(b) |
| Parameters values | ratios | ratios | ratios | ratios |
| : 0.2/2/20 sccm | 1.04 | 1.22 | .98 | .90 | 1.12 | 1.68 | .95 | .79 | : 200/400/800 K | 1.21 | 1.30 | .90 | .86 | .81 | .79 | 1.56 | 1.49 | : 0.1/0.3/0.6 cm | .47 | .72 | .77 | .61 | 1.01 | .84 | .48 | .41 | : 9./13./16 cm | .78 | .92 | .80 | .85 | 1.27 | 1.10 | .56 | .72 | Loss to mantle 3/5/8 % | 1.07 | 1.09 | .94 | .93 | 1.33 | 1.34 | .87 | .85 | : 50/100/200 W | 1.19 | 1.86 | 1.82 | 1.41 | .72 | .49 | 2.85 | 2.87 |
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