Research Article

Plasma Reactors and Plasma Thrusters Modeling by Ar Complete Global Models

Table 9

Sensitivity of core region plasma parameters, for a pressure of 2.5 mTorr. Presentation of results follows this of Tables 7 and 8.
(a)

Parameters values (eV) ( 1012 cm−3) ( 1010 cm−3) (%)

: 0.2/2/20 sccm4.56/4.72/ 5.775.89/5.77/5.171.45/1.63/2.7322.5/21.4/17.0
: 200/400/800 K3.91/4.72/6.146.40/5.77/4.992.01/1.63/1.2813.7/21.4/31.8
: 0.15/0.3/0.6 cm 9.96/4.72/3.397.48/5.77/3.491.61/1.63/1.3744.2/21.4/8.7
: 9./13./16 cm6.07/4.72/4.367.18/5.77/4.931.28/1.63/1.8038.3/21.4/15.5
Loss to mantle 3/5/8%4.40/4.72/5.136.12/5.77/5.341.23/1.63/2.1824.6/21.4/18.1
: 50/100/200 W3.98/4.72/8.763.17/5.77/8.122.25/1.63/0.807.5/21.4/61.39

(b)

Parameters values ratios ratios ratios ratios

: 0.2/2/20 sccm1.041.22.98.901.121.68.95.79
: 200/400/800 K1.211.30.90.86.81.791.561.49
: 0.1/0.3/0.6 cm .47.72.77.611.01.84.48.41
: 9./13./16 cm.78.92.80.851.271.10.56.72
Loss to mantle 3/5/8 %1.071.09.94.931.331.34.87.85
: 50/100/200 W1.191.861.821.41.72.492.852.87