Research Article

Global Modeling of N2O Discharges: Rate Coefficients and Comparison with ICP and Glow Discharges Results

Table 1

Global description of the reactions included in the plasma kinetic system.

No.  ProcessDescriptionRate

Electron impact ionization (rates in cm3 s−1)
1 N2O, N2, O2, N, O(3P), O(1D) + e N2O+, , , N+, O+ + 2eN2O, N2, O2, N, O(3P), O(1D) ionizations

Electron impact dissociation (rates in cm3 s−1)
2 N2O + e N2 + O(3P) + e N2O diss. by e impact leading to N2 + O(3P)
3 N2O + e N2 + O(1D) + e N2O diss. by e impact leading to N2 + O(1D)
4 N2O + e NO + N + e N2O diss. by e impact leading to NO + N
5 N2O + e N2 + O N2O dissociative attachment
6 N2 + e 2N + e N2 dissociation (see Table 3)
7 O2 + e 2O + e O2 dissociation (see Table 4)

Electronic excitation/deexcitation (rates in cm3 s−1)
8 N2( )+ e N2 ( ) + e   N2 vibrational excitation/deexcitation
9 O(3P) + e O(1D) + e O(1D) excitation/deexcitation

Heavy particle collisions: dissociation (rates in cm3 s−1)
10 N2O + O(1D) N2 + O2 N2O diss. with O(1D) leading to N2 + O2
11 N2O + O(1D) 2NO N2O diss. with O(1D) leading to 2NO

Heavy particle collisions: deexcitation (rates in cm3 s−1)
12 N2 + O(1D) N2 + O(3P) O(1D) deexcitation with N2
13 O2 + O(1D) O2 + O(3P) O(1D) deexcitation with O2

Heavy particle collisions: rearrangement (rates in cm3 s−1)
14 NO + N O + N2 NO rearrangement leading to O + N2
15 NO + O(1D) N + O2 NO rearrangement leading to N + O2

Neutralization (rates in cm3 s−1)
16 N2O+, , , O+ + O N2O, N2, O2, O + O O neutralization by N2O+, , , O+

O recombination (rates in cm3 s−1)
17 N2 ( ) + O N2 ( ) + O + e O recombination with N2   )
18 O + O O2 + e O recombination with O

Reactions on the wall (rates in s−1)
19 N2O+, , , N+, O+ N2O, N2, O2, N, O N2O, N2, O2, N, O recomb. on the wall
20 N2 ( ) N2 ( ) N2 ( ) deexcitation on the wall
21 O(1D) O(3P) O(1D) deexcitation on the wall
22 N, O (1/2)N2, (1/2)O2 N2, O2 formation on the wall