Research Article

Global Modeling of N2O Discharges: Rate Coefficients and Comparison with ICP and Glow Discharges Results

Table 11

Sensitivity of various PR parameters for a pressure of 5 mTorr, including the configuration available in the experiment [7].

Parameters values1 
2 
/
3 
/
4 
/
5 
/
6 

: 250–500 W* ↑2.20
[↑1.31/1.36]
2.03
[2.77]
↑2.17
[↑2.29]
↑2.19
[↑1.19]
2.931.00
[↑1.17]
: 20–80 sccm1.08**↑4.671.461.16↑2.091.02
: 0.02/0.07↑1.131.111.83↑1.061.191.00
: 0.17/0.50 1.05↑1.321.141.99↑1.691.00

Values from [7] are included in first row(bold brackets)except for / .
**Small peak at 40 sccm before decreasing.