Global Modeling of N₂O Discharges: Rate Coefficients and Comparison with ICP and Glow Discharges Results

Table 2

Reactions involving N₂O and NO species considered in the N₂O plasma kinetic system.

No.	Process	Description	Rate	PoBE
Electron collisions (rates in cm^3 s^−1)
1	N2O + e^−→N2O^+ + 2e^−	N2O ionization	𝑘IN2O	*
2	N2O + e^−→N2 + O(^3P) + e^−	N2O diss. by e^− impact, diss 1	𝑘D1N2O	*
3	N2O + e^−→N2 + O(^1D) + e^−	N2O diss. by e^− impact, diss 1bis	𝑘D1N2OBIS	*
4	N2O + e^−→NO + N + e^−	N2O diss. by e^− impact, diss 2	𝑘D2N2O
5	N2O + e^−→N2 + O^−	N2O diss. attachment, diss 3	𝑘D3N2O
Heavy particle collisions (rates in cm^3 s^−1)
6	N2O + O(^1D)→N2 + O2	N2O diss. with O(^1D), diss 4	𝑘D4N2O
7	N2O + O(^1D)→2NO	N2O diss. with O(^1D), diss 5	𝑘D5N2O
8	NO + N→O + N2	NO rearrangement giving O	𝑘REARN
9	NO + O(^1D)→N + O2	NO rearrangement giving N	𝑘REAROD
10	N2O^+ + O^−→N2O + O	N2O recombination	𝑘RN2O
Reactions on the wall (rates in s^−1)
11	N2O^+−−−→^wall N2O	N2O recombination on the wall	𝑘RWN2O