Research Article
Global Modeling of N2O Discharges: Rate Coefficients and Comparison with ICP and Glow Discharges Results
Table 2
Reactions involving N2O and NO species considered in the N2O plasma kinetic system.
| No. | Process | Description | Rate | PoBE |
| Electron collisions (rates in cm3 s−1) | 1 | N2O + e−→N2O+ + 2e− | N2O ionization | | * | 2 | N2O + e−→N2 + O(3P) + e− | N2O diss. by e− impact, diss 1 | | * | 3 | N2O + e−→N2 + O(1D) + e− | N2O diss. by e− impact, diss 1bis | | * | 4 | N2O + e−NO + N + e− | N2O diss. by e− impact, diss 2 | | | 5 | N2O + e−→N2 + O− | N2O diss. attachment, diss 3 | | |
| Heavy particle collisions (rates in cm3 s−1) | 6 | N2O + O(1D)→N2 + O2 | N2O diss. with O(1D), diss 4 | | | 7 | N2O + O(1D)→2NO | N2O diss. with O(1D), diss 5 | | | 8 | NO + N→O + N2 | NO rearrangement giving O | | | 9 | NO + O(1D)→N + O2 | NO rearrangement giving N | | | 10 | N2O+ + O−→N2O + O | N2O recombination | | |
| Reactions on the wall (rates in s−1) | 11 | N2O+ N2O | N2O recombination on the wall | | |
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