Research Article

Small Antenna Based on MEMS and Metamaterial Properties for Reconfigurable Applications

Figure 9

SEM photographs of (a) the MEMS capacitor, (b) a MEMS-MTM antenna basic cell, and (c) a ZOR resonator.
498176.fig.009a
(a)
498176.fig.009b
(b)
498176.fig.009c
(c)