International Journal of Antennas and Propagation / 2015 / Article / Fig 53

Review Article

Taming the Electromagnetic Boundaries via Metasurfaces: From Theory and Fabrication to Functional Devices

Figure 53

Interference lithography by surface plasmon polariton. (a) SEM image of the fabricated sample. (b) Simulated electric field distribution. (c) Schematic of the improved lithography technique. (d) Two-dimensional interference patterns. Figures are reproduced from [31, 260].
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