Research Article
Modeling and Electromagnetic Analysis of Multilayer Through Silicon Via Interconnect for 3D Integration
Table 3
RLC analytical formula of different transmission lines [
12] see Figure
3.
| | Parallel plate | Coaxial cable | Two parallel wires |
|
Capacitance (F) | | | |
|
Inductance (H) | | | |
|
Conductance (S) | | | |
|
|